무제 문서
무제 문서
 
온/습도 변환기
반도체공정용열전대 표준백금저항온도계 일반산업용저항온도계 t/c wafer 절연관,보호관 열전대 조건및 디지탈온도계 온/습도 기록계 디지탈 온/습도계 온/습도 변환기

 

Model PW01

Application Area

Photo regist
Probe hot plate
Real time process monitoring 0 ~ 250 ℃
Specifications

Wafer size : 2" ~ 12"
T/C type : K.J.E.T...
Number of Sensor Available : 1 ~ 34
Insulation : Teflon sleeving, Polyimide
Connectors : 2-pin, sub-miniature plugs, D-type sub-miniature, ...

 

Model PW02

Application Area

CVD, LP CVD, PVD, PE CVD
Diffusion, Sputtering
Real time process monitoring 0 ~ 800 ℃

Specifications

Wafer size : 2" ~ 12"
T/C type : K, R
Number of Sensor Available : 1 ~ 34
Insulation : Silica sleeving, Quartz micro tubing
Connectors : 2-pin, sub-miniature plugs, D-type sub-miniature, ...

 


 

Model PW03

Application Area

LCD Processing Systems
Plat Panel Substrates
Memory Disk Deposition System

Specifications

Glass size : Customer supplied
T/C type : K, R
Number of Sensor Available : 1 ~ 34
Insulation : Silica sleeving, Quartz micro tubing
Connectors : 2-pin, sub-miniature plugs, D-type sub-miniature, ...